专利名称：Reticle pod
发明人：コルボー，スティーブン，ピー,マクマレン，ケ
ヴィン,ティーブン，アンソニー，エム,カズ，マ
シュー,アンデルセン，クリスチャン,ワング，ハ
ウピング,サイスウスキー，マイケル,ジョンソ
ン，マイケル，エル,ハルブメイヤー，デイビッ
ド，エル,ライスタッド，ジョン
申请号：JP2008533516
申请日：20060927
公开号：JP2009510525A
公开日：
クルマレテ20090312
专利内容由知识产权出版社提供
专利附图：
摘要：A container that provides support structure and environmental control means including, for example, minimal contact with a wafer or reticle contained therein that
cooperates with wafer or reticle to provide a diffusion barrier mitigates against particles settling on a face of the wafer or reticle. The container includes a base having a flat, polished surface with protrusions upon which the wafer or reticle rests. The protrusions are of a geometry, such as a sphere, that imparts minimum contact with the wafer or reticle and suspends the wafer or reticle over the base, providing a gap therebetween. The gap isolates the wafer or reticle from the flat, polished surface of the base, but is dimensioned to inhibit migration of particles into the gap, thereby preventing contamination of sensitive surfaces of the wafer or reticle. Diffusion filters provide pressure equalization without filter media. Moveable reticle pins on the top cover provide reticle restraint. Dual containment pod embodiment provides further isolation and protection.
申请人：インテグリス・インコーポレーテッド
地址：アメリカ合衆国ミネソタ州５５３１８，チャスカ ライマン ブールバード３５００国籍：US
代理人：特許業務法人岡田国際特許事務所
更多信息请下载全文后查看
版权声明：本站内容均来自互联网，仅供演示用，请勿用于商业和其他非法用途。如果侵犯了您的权益请与我们联系QQ:729038198，我们将在24小时内删除。
发表评论